File:EUV H-V Best Focus.png

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EUV_H-V_Best_Focus.png ‎(651 × 515 pixels, file size: 45 KB, MIME type: image/png)

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Description
English: Best focus position for horizontal (H) and vertical (V) spaces as a function of pitch and NA (space width = 20 nm for NA=0.33, 12 nm for NA=0.55). A small annular illumination source is used. Ref.: J. van Schoot et al., 2016 EUVL Workshop, slide 19.
Date
Source https://www.euvlitho.com/2016/P61.pdf
Author J. van Schoot et al.
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Public domain This image of simple geometry is ineligible for copyright and therefore in the public domain, because it consists entirely of information that is common property and contains no original authorship.
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The original description page was here. All following user names refer to en.wikipedia.
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2018-07-03 21:04:03 651 × 515 Guiding light Uploading a public-domain item using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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Date/TimeThumbnailDimensionsUserComment
current16:28, 20 August 2019Thumbnail for version as of 16:28, 20 August 2019651 × 515 (45 KB)Dave louis john (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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