File:Immersion lithography illustration.svg

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Original file(SVG file, nominally 433 × 290 pixels, file size: 8 KB)

Captions

Captions

Immersion lithography

Summary[edit]

Description
English: Illustration of Immersion lithography.
Date (UTC)
Source Own work
Author Oleg Alexandrov
Other versions

[edit]

SVG development
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Licensing[edit]

Public domain I, the copyright holder of this work, release this work into the public domain. This applies worldwide.
In some countries this may not be legally possible; if so:
I grant anyone the right to use this work for any purpose, without any conditions, unless such conditions are required by law.

File history

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Date/TimeThumbnailDimensionsUserComment
current02:52, 20 July 2007Thumbnail for version as of 02:52, 20 July 2007433 × 290 (8 KB)Oleg Alexandrov (talk | contribs)tweak
02:50, 20 July 2007Thumbnail for version as of 02:50, 20 July 2007433 × 290 (7 KB)Oleg Alexandrov (talk | contribs){{Information |Description= Illustration of en:Immersion lithography |Source=self-made with en:Inkscape |Date= ~~~~~ |Author= Oleg Alexandrov }} {{PD-self}} Category:Microlithography

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